CMOS-compatible MEMS pirani gauge for broad range vacuum measurements

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dc.contributor.authorGarg, Manu
dc.date.accessioned2024-12-19T03:59:22Z
dc.date.issued2024-07-01
dc.identifier.urihttp://ir.iitd.ac.in/handle/123456789/5789
dc.language.isoen
dc.publisherIIT Delhi
dc.subjectVacuum detection | Stress engineering | Joule heating | Monolithic integration | Pirani gauge
dc.titleCMOS-compatible MEMS pirani gauge for broad range vacuum measurements
dc.typeThesis

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