Inorganic thin film materials for microlithography

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dc.contributor.authorGupta, Pramod Kumar
dc.date.accessioned2025-03-01T09:25:59Z
dc.date.issued1986-04-01
dc.identifier.urihttp://ir.iitd.ac.in/handle/123456789/7359
dc.language.isoen
dc.publisherIIT Delhi
dc.subjectPhysics
dc.titleInorganic thin film materials for microlithography
dc.typeThesis

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