Investigation of light ion implantation damage and its annealing in P-type silicon
dc.contributor.author | Jain, A. | |
dc.date.accessioned | 2025-02-03T12:19:21Z | |
dc.date.issued | 1977 | |
dc.identifier.uri | http://ir.iitd.ac.in/handle/123456789/6837 | |
dc.language.iso | en | |
dc.publisher | IIT Delhi | |
dc.subject | Electronic Devices | |
dc.title | Investigation of light ion implantation damage and its annealing in P-type silicon | |
dc.type | Thesis |