Properties of RF plasma grown AL(2) O(3) and ALN insulators on silicon and effects of plasma annealing on thermally grown SiO(2) films

Chandra, Sudhir2025-02-091980http://ir.iitd.ac.in/handle/123456789/7012enPlasma PhysicsThin filmsFluid MechanicsProperties of RF plasma grown AL(2) O(3) and ALN insulators on silicon and effects of plasma annealing on thermally grown SiO(2) filmsThesis