Investigations of sheath formation during plasma-surface interaction

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dc.contributor.authorDhawan, Rajat
dc.date.accessioned2024-12-31T11:45:07Z
dc.date.issued2022-10-01
dc.identifier.urihttp://ir.iitd.ac.in/handle/123456789/6176
dc.language.isoen
dc.publisherIIT Delhi
dc.subjectCorrosion resistance
dc.subjectMicroelectronics
dc.subjectSemiconductors
dc.subjectAutomobile industries
dc.subjectElectronegative plasma
dc.titleInvestigations of sheath formation during plasma-surface interaction
dc.typeThesis

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