Internal dielectric transduced microelectromechanical actuators and resonators

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dc.contributor.authorVerma, Satish Kumar
dc.date.accessioned2024-12-16T11:49:38Z
dc.date.issued2024-07-01
dc.identifier.urihttp://ir.iitd.ac.in/handle/123456789/5619
dc.language.isoen
dc.publisherIIT Delhi
dc.subjectActuators | Resonators | Ultrasonic transducers | Electrostatic | BVD model
dc.titleInternal dielectric transduced microelectromechanical actuators and resonators
dc.typeThesis

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