Electroplated bistable MEMS actuator using BEOL compatible process and tunning of residual stress

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dc.contributor.advisorMitra, Bhaskar
dc.contributor.authorAgrawal, Vasudha
dc.date.accessioned2023-08-09
dc.date.accessioned2024-10-29T11:19:13Z
dc.date.issued2023
dc.identifier.urihttp://10.17.50.146:4000/handle/123456789/3627
dc.relation.ispartofseriesTH7385
dc.subjectUV LIGA
dc.titleElectroplated bistable MEMS actuator using BEOL compatible process and tunning of residual stress
dc.typeThesis

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