Statistics for Properties of RF plasma grown AL(2) O(3) and ALN insulators on silicon and effects of plasma annealing on thermally grown SiO(2) films
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| Properties of RF plasma grown AL(2) O(3) and ALN insulators on silicon and effects of plasma annealing on thermally grown SiO(2) films | 6 |
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| TH-724_ABSTRACT.pdf | 75 |